- Repetition rate: 1 Hz – 200 kHz
- Pulse length: 250 fs – 10 ps
- Maximal power: 3 W
- Maximal pulse energy: 1 mJ
- Wavelength: 1030 nm
- Beam diameter (1/e2): 5 mm
- M2: < 1.2
- Harmonic frequencies :
- 2nd 515 nm (~ 0.5 mJ @ 2 kHz);
- 3rd 343 nm (~ 0.25 mJ @ 2kHz);
- 4th 257 nm (~ 0.1 mJ @ 2kHz).
The laser station is equipped with:
Galvoscanner system (Scanlab SCANcube III):
- Operation with 1030 or 515 nm;
- Scanning speed: ≤ 2 m/s;
- Positioning precision: ~1 μm;
- 10×10 cm processing area.
Microprocessing system:
- xyz-stage scanning;
- Scanning speed: ≤ 1 m/s;
- Minimum step: < 150 nm;
- 11×11 cm processing area.
