Laser micro‐processing target area with Pharos laser

• Repetition rate: 1 Hz – 200 kHz
• Pulse length: 250 fs – 10 ps
• Maximal power: 3 W
• Maximal pulse energy: 1 mJ
• Wavelength: 1030 nm
• Beam diameter (1/e²): 5 mm
• M²: < 1.2
• Harmonic frequencies :
  • 2nd 515 nm (~ 0.5 mJ @ 2 kHz);
  • 3rd 343 nm (~ 0.25 mJ @ 2kHz);
  • 4th 257 nm (~ 0.1 mJ @ 2kHz).

The laser station is equipped with:

Galvoscanner system (Scanlab SCANcube III):

• Operation with 1030 or 515 nm;
• Scanning speed: ≤ 2 m/s;
• Positioning precision: ~1 μm;
• 10×10 cm processing area.

Microprocessing system:

• xyz-stage scanning;
• Scanning speed: ≤ 1 m/s;
• Minimum step: < 150 nm;
• 11×11 cm processing area.