Laser micro‐processing target area with Pharos laser

  • Repetition rate: 1 Hz – 200 kHz
  • Pulse length: 250 fs – 10 ps
  • Maximal power: 3 W
  • Maximal pulse energy: 1 mJ
  • Wavelength: 1030 nm
  • Beam diameter (1/e2): 5 mm
  • M2: < 1.2
  • Harmonic frequencies :
    • 2nd 515 nm (~ 0.5 mJ @ 2 kHz);
    • 3rd 343 nm (~ 0.25 mJ @ 2kHz);
    • 4th 257 nm (~ 0.1 mJ @ 2kHz).

The laser station is equipped with:

Galvoscanner system (Scanlab SCANcube III):

  • Operation with 1030 or 515 nm;
  • Scanning speed: ≤ 2 m/s;
  • Positioning precision: ~1 μm;
  • 10×10 cm processing area.

Microprocessing system:

  • xyz-stage scanning;
  • Scanning speed: ≤ 1 m/s;
  • Minimum step: < 150 nm;
  • 11×11 cm processing area.

Oleksandr Gatsa, Ph.D.

Postdoctorand: Scientific Laser Applications; oleksandr.gatsa(at)hilase.cz; +420 314 007 731