PLD workstation for thin film deposition and laser ablation plume analysis

High vacuum chamber reachable to < 5×10-6 mbar base pressure and equipped with:

  • 1 inch motorized rotatable target holder
  • Substrate heater
  • Langmuir ion probe
  • Gas inlet system (pressure range 1×10-4– 1.1 mbar) to perform PLD experiments in high vacuum and in backround gas environment

Possibility to perform ablation plume spectroscopy and study ablation plume dynamics using:

  • Andorâ Kymera 328i Czerny-turner spectrograph attached to Andorâ iStar-DH340T ICCD (getting speed: 2 ns, spectral range: 180-850 nm)
  • Andorâ iStar-334T ICCD (getting speed: 2ns, spectral range: 270-810 nm)

Available laser for PLD:

  • Pharos, Light Conversion (1030 nm, 532 nm, 343 nm, 257 nm; 250 fs – 10 ps, 2kHz -200 kHz)
  • NL230, Ekspla (1064 nm, 532 nm, 355 nm; 3-6 ns; 100 Hz)

Dr. Inam Mirza

Team Leader: Pulsed Laser Deposition | +420 314 007 731 | mirzam(at)hilase.cz