Laser micro‐processing target area with Pharos laser

The laser station uses Pharos laser and is equipped with:

Galvoscanner system (Scanlab SCANcube III):

• Operation wavelengths: 1030, 515, 257 nm;
• Scanning speed: ≤ 2 m/s;
• Positioning precision: ~1 μm;
• Processing area: 10×10 cm (1030, 515 nm), 65×65 mm (257 nm).

Microprocessing system:

• Operation wavelengths: 1030, 515, (343) nm;
• xyz-stage scanning;
• Scanning speed: ≤ 0.1 m/s;
• Minimum step: 150 nm;
• Processing area: 10×10 cm;
• Max load: 20 kg.